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Development of a Piezoelectric MEMS Switch Architecture for Low Power, Radiation Hardened and Highly Integrable Mechanical Logic Open Access

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This document proposes a purely MEMS based solution to these issues by using mechanical relays designed for digital computation. Moreover, the document presents the development and verification of a novel lead zirconate titinate (PZT) Piezoelectric MEMS (PiezoMEMS) digital switch architecture designed around that concept. In addition to providing directly integrable control of other MEMS devices designed within this processes, fabricated device verification illustrates that the architecture has other advantages over modern CMOS processes in terms of power consumption, temperature insensitivity, on-state resistance, off-state isolation and radiation hardness.The architecture described within this work contains all of the necessary components -- combination logic, memory, oscillators and an analog to digital interface -- to realize a complete MEMS microcontroller. The relays developed for these components have a static power dissipation of less than 30 fW and a switching energy of 500 fJ per relay. Additionally, the relays have shown repeatable propagation delays under 100 ns while consuming an average area of 67 x 31 microns squared. These characteristics, coupled with a mechanical design optimized for Boolean logic computation, give current generation components a power consumption advantage over modern CMOS at lower frequencies. Furthermore, predicted scaling benefits show that dynamic energy consumption can be reduced to less than 10 aJ, with static power scaling similarly.

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