Virtual Reality for Nanofabrication Education

Given the strategic importance of the semiconductor manufacturing sector and the CHIPS Act impact on microelectronics, it is more imperative than ever to train the next generation of scientists and engineers in the field. However, this is a challenging feat since nanofabrication education uses hands-on cleanroom facilities. Since cleanrooms are expensive, have access constraints due to safety concerns, and offer limited instructional space, class sizes and outreach events are limited. To complement instruction in nanotechnology education, there are some open- or educational-access software, which is computer-based and focuses only on training for individual equipment, not on the typical workflow for device fabrication. The objective of this work was to develop an accessible virtual reality ecosystem that provides an immersive education and outreach on device nanofabrication that is user-friendly for a broad range of audiences. For this project, a virtual reality cleanroom prototype has been developed. It consists of a 45-minute gameplay module that covers the process flow for the fabrication of micro-scale resistors, from sample preparation to electrical characterization. We also performed multiple studies to investigate how students in high school and nanoelectronics courses utilized this virtual reality cleanroom prototype and what changes they recommend to enhance its user interface and learner experience. Students taking the course can be undergraduate (junior or senior) or graduate (masters or PhD). The research questions for this study were 1) what is the user experience with the virtual reality cleanroom prototype, 2) what challenges, if any, did students experience, and 3) what changes did students recommend to improve the virtual reality cleanroom prototype learner experience? Preliminary results indicate that the students found the virtual reality cleanroom simulator helpful in repeatedly exploring the cleanroom space and the nanofabrication process flow in a safe way. This helped develop more confidence in utilizing the actual cleanroom facility. The results of these studies will provide insight on the design of future modules with more complicated levels and device process flows. Moreover, the study could inform the development of other virtual reality simulators for other lab activities. The improved usability of this software could provide students, K-12 to college, the opportunity to conduct realistic process workflows, learn first-hand about nanofabrication, and practice using a nanofabrication lab via trial and error in a safe virtual environment whether classes are virtual or in-person.

Author

• Letavish, Sean William

Language

• en

Keyword

• Virtual Reality
• Cleanroom
• Nanofabrication

Date created

• 2023

Type of Work

• Master's Thesis

License

• All rights reserved

Rights statement

• In Copyright

GW Unit

• Electrical Engineering

Degree

• M.S.

Advisor

• Adam, Gina C

Committee Member(s)

• Zaghloul, Mona
• Ahmadi, Sharokh
• Ok, Hurriyet

Persistent URL

•  https://scholarspace.library.gwu.edu/etd/m900nv28c