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A Low Power Microheater for Thermal Control and Discrimination of Mixture Gases Open Access

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Gas sensors are of the importance to microelectromechanical system (MEMS) technology. Various types of solid-state sensors have been developed for gas sensing purposes which include surface acoustic wave, field effect transistor (FET), electrochemical, chemi-resistive, plasmonic sensors, etc. Plasmonic platforms are nowadays found attractive for gas sensing. In a typical plasmonic sensor, changes in the refractive index of the surrounding dielectric medium due to the presence of target analytes alter the nature (intensity, wavelength) of the resonating signal. Essentially, the temperature of the sensing film affects a lot of performance of gas sensors, including its wavelength shift, base conductance, and the absorption or desorption of gases. The different thermal responses are mainly determined by the kinetics of interactions between the MOF and adsorbed analytes. Here I report a low power microheater that can be embedded together with a plasmonic gas sensor. With the help of the microheater, one can control the sensing temperature of the sensor so that responses at different temperatures e.g. from 318 K to 396 K can be measured. By applying thermal kinetic analysis, we can successfully discriminate single gas and even the mixture of two gases.

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