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Filtering by: Committee Member Kramar, John A. Committee Member Lee, James D. Keyword compact actuator

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Description:: In this dissertation, we present the design, modification, optimization, assembly, performance characterization, calibration, and uncertainty analysis for a compact, for the Molecular Measuring Machine (M3) at the National Institute of Standards and Technology. The M3 is a scanning probe...
Author:: Li, Jing
Keyword:: capacitance gauge, flexure hinge amplifier, Molecular Measuring Machine, compact actuator, and scanning probe microscope
GW Unit:: Mechanical & Aerospace Engineering
Degree:: D.Sc.
Advisor:: Shen, Yin-Lin
Committee Member(s):: Leng, Yongsheng, Garris, Charles A., Lee, James D., and Kramar, John A.
Resource Type:: Thesis or Dissertation

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