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Filtering by: Advisor Shen, Yin-Lin Committee Member Kramar, John A. Committee Member Lee, James D. Keyword compact actuator

A Compact, Dual-stage Actuator with Displacement Sensors for the Molecular Measuring Machine

Description:

In this dissertation, we present the design, modification, optimization, assembly, performance characterization, calibration, and uncertainty analysis for a compact, for the Molecular Measuring Machine (M3) at the National Institute of Standards and Technology. The M3 is a scanning probe...

Author:

Li, Jing

Keyword:

flexure hinge amplifier, Molecular Measuring Machine, scanning probe microscope, capacitance gauge, and compact actuator

GW Unit:

Mechanical & Aerospace Engineering

Degree:

D.Sc.

Advisor:

Shen, Yin-Lin

Committee Member(s):

Garris, Charles A., Leng, Yongsheng, Kramar, John A., and Lee, James D.

Resource Type:

Thesis or Dissertation