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Filtering by: Advisor Shen, Yin-Lin Remove constraint Advisor: Shen, Yin-Lin Committee Member Kramar, John A. Remove constraint Committee Member: Kramar, John A. Committee Member Garris, Charles A. Remove constraint Committee Member: Garris, Charles A. Author Li, Jing Remove constraint Author: Li, Jing Keyword capacitance gauge Remove constraint Keyword: capacitance gauge Keyword Molecular Measuring Machine Remove constraint Keyword: Molecular Measuring Machine Keyword flexure hinge amplifier Remove constraint Keyword: flexure hinge amplifier Type of Work Thesis or Dissertation Remove constraint Type of Work: Thesis or Dissertation

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