Filtering by: Advisor Shen, Yin-Lin Remove constraint Advisor: Shen, Yin-Lin Committee Member Garris, Charles A. Remove constraint Committee Member: Garris, Charles A. Author Li, Jing Remove constraint Author: Li, Jing Degree D.Sc. Remove constraint Degree: D.Sc. Keyword capacitance gauge Remove constraint Keyword: capacitance gauge Keyword scanning probe microscope Remove constraint Keyword: scanning probe microscope